The Tropel® UltraSort™ II FlatMaster® Semi-Automated Wafer (SAW) Metrology Module continues our 40 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, non-contact qualification of silicon and alternative substrate wafers.

The Tropel UltraSort II FlatMaster SAW system integrates a grazing-incidence interferometer with automated staging for improved wafer loading and measurement repeatability. The Tropel UltraSort II FlatMaster SAW can be configured to measure wafer sizes from 2 inches to 8 inches in diameter, is field upgradable to full automation and sorting, and is well suited for a variety of different materials including silicon carbide, gallium arsenide, sapphire, quartz, germanium, silicon, and many others.

The power of grazing-incidence interferometry that makes the Tropel® FlatMaster® System an industry standard for precision flatness is offered on the Tropel UltraSort II FlatMaster SAW System.